洁洁净度等级
|
粒么粒径(u m)粒 径 (um)
|
||||
|
0.1
|
0.2
|
0.3
|
0.5
|
5.0
|
1
|
35.0
|
7.50
|
3.00
|
1.00
|
NA
|
10
|
350
|
75.0
|
30.0
|
10.0
|
NA
|
100
|
NA
|
750
|
300
|
100
|
NA
|
1000
|
NA
|
NA
|
NA
|
1000
|
7.0
|
10000
|
NA
|
NA
|
NA
|
10000
|
70.3
|
100000
|
NA
|
NA
|
NA
|
100000
|
700
|
洁净度级别
|
尘埃最允许数/平方米
|
微生物最大允许数
|
||
|
≥0.5um
|
≥5um
|
浮游菌个/立方米
|
沉降菌个/皿.30min
|
100
|
3500
|
0
|
5
|
1
|
10000
|
350,000
|
2,000
|
100
|
3
|
100000
|
3,500,000
|
20,000
|
500
|
10
|
300000
|
10,500,000
|
61,800
|
NA
|
15
|
个/M3≥0.5um
|
ISO
14644-1(1999) |
US
209E(1992) |
US
209D(1988) |
EEC
GGMP(1989) |
FRANCE
AFNOR(1981) |
GERMANY
VDI 2083(1990) |
JAPAN
JAOA(1989) |
1
|
-
|
-
|
-
|
-
|
-
|
-
|
-
|
3.5
|
2
|
-
|
-
|
-
|
-
|
0
|
2
|
10.0
|
-
|
M1
|
-
|
-
|
-
|
-
|
-
|
35.3
|
3
|
M1.5
|
1
|
-
|
-
|
1
|
3
|
100
|
-
|
M2
|
-
|
-
|
-
|
-
|
-
|
353
|
4
|
M2.5
|
10
|
-
|
-
|
2
|
4
|
1,000
|
-
|
M3
|
-
|
-
|
-
|
-
|
-
|
3,530
|
5
|
M3.5
|
100
|
A+B
|
4,000
|
3
|
5
|
10,000
|
-
|
M4
|
-
|
-
|
-
|
-
|
-
|
35,300
|
6
|
M4.5
|
1,000
|
1,000
|
-
|
4
|
6
|
100,000
|
-
|
M5
|
-
|
-
|
-
|
-
|
-
|
353,000
|
7
|
M5.5
|
10,000
|
C
|
400,000
|
5
|
7
|
1,000,000
|
-
|
M6
|
-
|
-
|
-
|
-
|
-
|
3,530,000
|
8
|
M6.5
|
100,000
|
D
|
4,000,000
|
6
|
8
|
10,000,000
|
-
|
M7
|
-
|
-
|
-
|
-
|
-
|